000			00442nam a22001457a 4500
003			OSt
005			20260313092951.0
008			260313b |||||||| |||| 00| 0 eng d
040			_cNVSU Library Bambang
100			_aRobinson, MC D. ,ed.
245			_aProceedings of the 9th International Conference on Chemical Vapor Deposition _cMC D. Robinson ,ed.
260			_aNJ: _bElectrochemical Society, _c1984.
300			_a810 p.
942			_2ddc _cBK _n0
999			_c6787 _d6787