000			00421nam a22001457a 4500
003			OSt
005			20260225083515.0
008			260225b |||||||| |||| 00| 0 eng d
040			_cNVSU Library Bambang
100			_aChiang, A. , ed.
245			_aSemiconductor‑on‑insulator & thin film transistor technology vol.53 _cA. Chiang , ed.
260			_aPennsylvania: _bMRS, _c1986 p.
300			_a474 p.
942			_2ddc _cBK _n0
999			_c6062 _d6062