000			00406nam a22001457a 4500
003			OSt
005			20260225082836.0
008			260225b |||||||| |||| 00| 0 eng d
040			_cNVSU Library Bambang
100			_aChang, R.P.H., ed.
245			_aPlasma synthesis & itching of electronic mats. vol.38 _cR.P.H. Chang, ed.
260			_aPennsylvania: _bMRS, _c1985.
300			_a522 p.
942			_2ddc _cBK _n0
999			_c6061 _d6061