000			00402nam a22001457a 4500
003			OSt
005			20260224163220.0
008			260224b |||||||| |||| 00| 0 eng d
040			_cNVSU Library Bambang
100			_aHoward, R. E. ,ed.
245			_aScience and Technology of Microfabrication vol. 76 _cR. E. Howard ,ed.
260			_aPennsylvania: _bMRS, _c1987.
300			_a373 p.
942			_2ddc _cBK _n0
999			_c6058 _d6058