000			00398nam a22001457a 4500
003			OSt
005			20260213111249.0
008			260213b |||||||| |||| 00| 0 eng d
040			_cNVSU Library Bambang
100			_aLevy, Roland A. , ed.
245			_aReduced thermal processing for ULSI _cRoland A. Levy, ed.
260			_aNY: _bPlenum Press, _c19?.
300			_a477 p.
942			_2ddc _cBK _n0
999			_c5206 _d5206